| Japanese Society of Electron Microscopy Award (Setoh Award) |
Y. Homma |
"Development of ultrahigh vacuum in situ scanning electron microscope
and its application to the study of crystal growth processes" |
May 14,2002 |
| The prize of the Japan Society for the Promotion of the Machine Industry
in 2002 |
H. Namatsu |
"Development of Supercritical Dryer for Ultra-fine Patterning" |
Dec. 4,2002 |
| The Japan Society of Applied Physics Young Scientist Award for the Presentation of an Excellent Paper |
K. Kanzaki |
"Effect of Resist Thickness on the Linewidth Fluctuations" |
Sept. 24,2002 |
| 23rd Int. Conf. on Low Temperature Physics POSTER AWARD |
E. Huefeld
T. Bauch
V. Krasnov
P. Delsing
H. Takayanagi |
"Critical Current Distributions in Ballistic Andreev Junctions" |
Aug. 27,2002 |