Nanostructure Technology Research Group

The mission of this group is to develop core technologies for high functional nanodevices, such as Si single electron devices. By the application of these technologies, nanodevices are fabricated and its characteristics are evaluated.The principal objects are as follows.

Research and development of nanofabrication technologies:
1. Apparatus and patterning simulation techniques for EB lithography.
2. High-performance resist materials and processing.
3. Measurement technologies of nanostructures.

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