This is the entrance page of my poster presentation for

1998 Int. Conf. on Characterization and Metrology for ULSI Technology


Title: Nanometrology Using Scanning Probe Microscopy and Its Application to Resist Patterns
Authors:M. Nagase, H. Namastu, K. Kurihara and T. Makino

Content of poster

TITLE

BACKGROUND

EXPERIMENTAL CONDITIONS

METHOD

RESULTS:Modeled Shape

RESULTS:Accuracy

SUMMARY


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