This is my poster presentaion for MNE99.

Imaging of Si nano-patterns embedded in silicon oxide using scanning electron microscopy

M. Nagase and K. Kurihara

MNE99[Micro- and Nano- Engineering 99]:(Rome, September 21-23, 1999)

Contents

[Title]

[Abstract]

[INTRODUCTION]
{Our Purpose}
{Subject}

[Experimental conditions]
sample/observation

[Results1] - Image of embedded Si nanostructure -
{XTEM/SEM(SE/BSE) images}
{Imaging mechanism}

[Results2] - Imaging conditions -
{Dependence on Acceleration Voltage (I)}
{Dependence on Acceleration Voltage (II)}
{Effect of Contamination}
{Image of Nano-wire of SET Device}

[Results3] - 3D shape of embedded Si Structure -
{3D information of Si embedded in oxide}
{3D structure of Si-SET device}

[Summary]

If you have any question or comment, please mail to nagase.

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upload :99/10/26

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