.This is my presentaion slides for NNCI2005.
Carbon multi-probes with nano-springs on a Si cantilever grown by ion beam-induced deposition
M. Nagase, K. Nakamatsu, S. Matsui, and H. Namatsu
NNCI2005(Conference on Nanoelectronics, Nanostructures, and Carrier Interaction), (NTT, Jan. 31- Feb. 2, 2005, NTT Atsugi R&D center, Atsugi, Kanagawa)
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Contents
[Background of study[
[Introduction]
[Nanotools]
[Nano-four-point-probe system fabricated by FIB milling with selfdetective sensors]
[Nano-four-point probes fabricated by EB lithography assembled using FIB technology]
[Carbon-multiprobes with nanosprings[
[Four-point-probe with nano-springs on a Si cantilever grown by ion beam induced deposition]
[FIB-CVD 3D structures]
[FIB-CVD 3D wires]
[Four-point-probe with nano-springs]
[Carbon spring in motion]
[Mechanical properties of FIB-CVD spring]
[Electrical characteristics of FIB-CVD probes]
If you have any question or comment, please mail to nagase.
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