This is my poster presentaion for SMAM-2 (Second International Symposium on Standard Materials and Metrology for Nanotechnology, 2006.5.25-26, Akihabara Convention Hall, Tokyo, Japan).

Title:

Tip Shape Characterization with a Si Nanostructure Fabricated Using Anisotropic Etching

Authors:

M. Nagase,and K. Kurihara

Contents:

[Title]

[Introduction]

{Metrology for Nanostructure Using SPM}
{Tip Characterization of Si Probe in 1994}

[Experimental Conditions]
{Tip Shape Characterization Using a Scale for Nanometrology}
{Nanoscale for SPM Fabricated Using Anisotropic Etching}

[Tip characterization]
{Modeling equation}
{Tip Characterization (1)}
{Tip Characterization (2)}

{Tip Characterizer Fabricated Using Anisotropic Etching}
{Tip Characterization (3)}
{Tip Characterization using Nanoscale}

[Summary]

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