This is my presentaion slides for STM05/ICSPM13 in July 5, 2005.

Carbon Multi-probes on a Si Cantilever for Pseudo-MOSFET

M. Nagase, K. Nakamatsu, S. Matsui, and H. Namatsu

STM05/ICSPM13(13th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques, 13th International Colloquium on Scanning Probe Microscopy, July 3-8, 2005, Sapporo Convention Center, Sapporo, Japan)

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Contents

[Title]

OUTLINE

-Background of study-
Introduction
Nanotools
Four-point-probe with nano-springs on a Si cantilever grown using focused-ion-bem chemical-vapor-deposition
Carbon spring in motion

-Experimental Setup-
FET probe for semiconductor film

-Results-
Pseudo-MOSFET characteristics of SOI
Drain voltage dependence of pseudo-MOS characteristics
Applications of pseudo-FET probe
FET characteristics of ECR sputtered carbon film

-SUMMARY-
Summary

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upload :2005/7/27

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