(1) gIsolating individual chains of selenium by incorporation into the channels of a zeoliteh
O. Terasaki, K. Yamazaki, J. M. Thomas, T. Ohsuna, D. Watanabe, J. V. Sandars and J. C. Barry
Nature 330, 58 (1987).
(2) gThe incorporation of selenium into the channels of mordenite: An electron microscopic studyh
O. Terasaki, K. Yamazaki, J. M. Thomas, T. Ohsuna, D. Watanabe, J. V. Sanders and J. C. Barry
J. Solid State Chem. 77, 72 (1988).
(3) gAbsorption spectra of selenium clusters and chains incorporated into zeolitesh
Y. Nozue, T. Kodaira, O. Terasaki, K. Yamazaki, T. Goto, D. Watanabe, J. M. Thomas
J. Phys.: Condens. Matter 2, 5209 (1990).
(4) gNanometer-scale linewidth fluctuations caused by polymer aggregates in resist filmsh
T. Yamaguchi, H. Namatsu, M. Nagase, K. Yamazaki and K. Kurihara
Appl. Phys. Lett. 71, 2388 (1997).
(5) gSilicon double-island single-electron deviceh
A. Fujiwara, Y. Takahashi, K. Yamazaki, H. Namatsu, M. Nagase, K. Kurihara and K. Murase
Tech. Dig. IEDM (1997) 163.
(6) gLinewidth fluctuations caused by polymer aggregates in resist filmsh
T. Yamaguchi, H. Namatsu, M. Nagase, K. Yamazaki, K. Kurihara
J. Photopolym. Sci. Technol, 10, 635 (1997).
(7) gNano-patterning of a hydrogen silsesquioxane resist with reduced linewidth fluctuationsh
H. Namatsu, T. Yamaguchi, M. Nagase, K. Yamazaki and K. Kurihara
Microelectron. Eng. 41/42, 331 (1998).
(8) gSi nanostructures formed by pattern-dependent oxidationh
M. Nagase, A. Fujiwara, K. Yamazaki, Y. Takahashi, K. Murase and K. Kurihara
Microelectron. Eng. 41/42, 527 (1998).
(9) gThree-dimensional siloxane resist for the formation of nanopatterns with minimum linewidth fluctuationsh
H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase and K. Kurihara
J. Vac. Sci. Technol. B 16, 69 (1998).
(10) gInfluence of edge roughness in resist patterns on etched patternsh
H. Namatsu, M. Nagase, T. Yamaguchi, K. Yamazaki and K. Kurihara
J. Vac. Sci. Technol. B 16, 3315 (1998).
(11) gSi memory device operated with a small number of electrons by using a single-electron- transistor detectorh
Y. Takahashi, A. Fujiwara, K. Yamazaki, H. Namatsu, K. Kurihara and K. Murase
IEE Electron. Lett. 34, 45 (1998).
(12) gA multi-gate single-electron transistor and its application to an exclusive-OR gateh
Y. Takahashi, A. Fujiwara, K. Yamazaki, H. Namatsu, K. Kurihara and K. Murase
Tech. Dig. IEDM (1998) 127.
(13) gNew development model: aggregate extraction developmenth
T. Yamaguchi, H. Namatsu, M. Nagase, K. Yamazaki and K. Kurihara
Proc. SPIE 3333, 830 (1998).
(14) gFabrication method for IC-oriented Si twin-island single-electron transistorsh
Y. Ono, Y. Takahashi, K. Yamazaki, M. Nagase, H. Namatsu, K. Kurihara and K. Murase
Tech. Dig. IEDM (1998) 123.
(15) gSupercritical drying for nanostructure fabrication without pattern collapseh,
H. Namatsu, K. Yamazaki and K. Kurihara
Microelectron. Eng. 46, 129 (1999).
(16) gA new approach to reducing line-edge roughness by using a cross-linked positive-tone resisth
T. Yamaguchi, H. Namatsu, M. Nagase, K. Yamazaki and K. Kurihara
Jpn. J. Appl. Phys. 38, 7114 (1999).
(17) gEffect of chelating agents on high resolution electron beam nanolithography of spin-coatable Al2O3 gel filmsh
M. S. M. Saifullah, H. Namatsu, T. Yamaguchi, K. Yamazaki and K. Kurihara
Jpn. J. Appl. Phys. 38, 7052 (1999).
(18) gSpin-coatable Al2O3 resist in electron beam nanolithographyh
M. S. M. Saifullah, H. Namatsu, T. Yamaguchi, K. Yamazaki and K. Kurihara
Proc. SPIE 3678, 633 (1999).
(19) gSi complementary single-electron inverterh
Y. Ono, Y. Takahashi, K. Yamazaki, M. Nagase, H. Namatsu, K. Kurihara and K. Murase
Tech. Dig. IEDM (1999) 367.
(20) gNovel fabrication techniques for silicon single-electron devicesh
Y. Takahashi, Y. Ono, A. Fujiwara, K. Yamazaki, M. Nagase, H. Namatsu, K. Kurihara and K. Murase
Proceedings of Electrochemical Society 99, 302 (1999).
(21) gA Si memory device composed of a one-dimensional metal-oxide-semiconductor field-effect-transistor switch and a single-electron-transistor detectorh
Y. Takahashi, A. Fujiwara, K. Yamazaki, H. Namatsu, K. Kurihara and K. Murase
Jpn. J. Appl. Phys. 38, 2457 (1999).
(22) gFabrication method for IC-oriented Si twin-island single-electron transistorsh
Y. Ono, Y. Takahashi, K. Yamazaki, M. Nagase, H. Namatsu, K. Kurihara and K. Murase
IEEE Trans. Electron Devices ED-47, 147 (2000).
(23) gSupercritical resist dryerh
H. Namatsu, K. Yamazaki and K. Kurihara
J. Vac. Sci. Techinol. B 18, 780 (2000).
(24) gMultigate single-electron transistors and their application to an exclusive-OR gateh
Y. Takahashi, A. Fujiwara, K. Yamazaki, H. Namatsu, K. Kurihara and K. Murase
Appl. Phys. Lett. 76, 637 (2000).
(25) gSi complementary single-electron inverter with voltage gainh
Y. Ono, Y. Takahashi, K. Yamazaki, M. Nagase, H. Namatsu, K. Kurihara and K. Murase
Appl. Phys. Lett. 76, 3121 (2000).
(26) gSingle-electron transistor and current-switching device fabrication by vertical pattern-dependent oxidationh
Y. Ono, Y. Takahashi, K. Yamazaki, M. Nagase, H. Namatsu, K. Kurihara and K. Murase
Jpn. J. Appl. Phys. 39, 2325 (2000).
(27) gSuppressed aggregate extraction development (SAGEX) resisth
T. Yamaguchi, H. Namatsu, M. Nagase, K. Yamazaki and K. Kurihara
J. Photopolymer Sci. Technol., 13, 427 (2000).
(28) gSi single-electron transistors with high voltage gainh
Y. Ono, K. Yamazaki and Y. Takahashi
IEICE Trans. Electron. E84-C, 1061 (2001).
(29) gSingle-electron and quantum SOI devicesh
Y. Ono, K. Yamazaki, M. Nagase, S. Horiguchi, K. Shiraishi and Y. Takahashi
Microelectron. Eng. 59, 435 (2001).
(30) gFabrication and magnetic properties of ultra high density permalloy dot arrayh
M. Yamada, K. Ono, K. Yamazaki, T. Yamaguchi, M. Nagase, K. Kurihara, H. Takenaka and M. Oshima
Proc. Int. Symposium on Advanced Physical Fields (NRIM Tsukuba, 2001) 352.
(31) hSingle-electron devices formed by pattern-dependence oxidation: microscopic structural evaluationh
M. Nagase, S. Horiguchi, A. Fujiwara, Y. Ono, K. Yamazaki, H. Namatsu and Y. Takahashi
Appl. Surf. Sci. 190, 144 (2002).
(32) gDetection of single charges and their generation-recombination dynamics in Si nanowires at room temperatureh
A. Fujiwara, K. Yamazaki and Y. Takahashi
Appl. Phys. Lett. 80, 4567, (2002).
(33) gFabrication of single-electron transistors and circuit using SOIsh
Y. Ono, K. Yamazaki, M. Nagase, S. Horiguchi, K. Shiraishi and Y. Takahashi
Solid State Electronics 46, 1723, (2002).
(34) hResist thinning effect on nanometer-scale line-edge roughnessh
K. Kanzaki, T. Yamaguchi, M. Nagase, K. Yamazaki and H. Namatsu
Jpn. J. Appl. Phys. 41, L1342 (2002).
(35) gMolecular weight effect on line-edge roughnessh
T. Yamaguchi, K. Yamazaki and H. Namatsu
Proc. SPIE 5039, 1212 (2003).
(36) gLine-edge roughness: characterization and material originh
T. Yamaguchi, K. Yamazaki, M. Nagase and H. Namatsu
Jpn. J. Appl. Phys. 42, 3755 (2003).
(37) gTurnstile operation using a silicon dual-gate single-electron transistorh
Y. Ono, Neil M. Zimmerman, K. Yamazaki, Y. Takahashi
Jpn. J. Appl. Phys. 42, L1109 (2003).
(38) gInfluence of oxidation temperature on Si-single electron transistor characteristicsh
H. Namatsu, Y. Watanabe, K. Yamazaki, T. Yamaguchi, M. Nagase, Y. Ono, F. Fujiwara and S. Horiguchi
J. Vac. Sci. Technol. B 21, 2869 (2003).
(39) hElectron beam nanolithography of b-ketoester modified aluminum tri-sec- butoxideh
M. S. M. Saifullah, Dae-Joon Kang, K. R. V. Subramanian, M. E. Welland, K. Yamazaki and K. Kurihara
J. Sol-Gel Sci. Technol. 29, 510 (2004).
(40) gInfluence of molecular weight of resist polymers on surface roughness and line-edge roughnessh
T. Yamaguchi, K. Yamazaki, and H. Namatsu
J. Vac. Sci. Technol. B 22, 2604 (2004).
(41) gSingle electron tunneling transistor with tunable barriers using silicon nanowire metal-oxide-semiconductor field-effect transistorh
A. Fujiwara, H. Inokawa, K. Yamazaki, H. Namatsu, Y. Takahashi, N. M. Zimmerman, and S. B. martin, Appl. Phys. Lett. 88, 053121 (2006).
(42) gFull adder operation based on Si nanodot array device with multi-inputs and multi-outputsh
T. Kaizawa, M. Arita, A. Fujiwara, K. Yamazaki, Y. Ono, H. Inokawa, Y. Takahashi, and J.-B. Choi
Int'l J. Nanotechnol. Molecular Computation 1 (2), 58 (2009).
(43) gSingle-electron device with a Si nanodot array and multiple input gatesh
T. Kaizawa, M. Arita, A. Fujiwara, K. Yamazaki, Y. Ono, H. Inokawa, Y. Takahashi, and J.-B. Choi
IEEE Trans. Nanotechnology 8, 535 (2009).
(44) gSilicon nanodot-array device with multiple gatesh
M. Jo, T. Kaizawa, M. Arita, A. Fujiwara, K. Yamazaki, Y. Ono, H. Inokawa, Y. Takahashi, and J.-B. Choi
Materials Science in Semiconductor Processing 11, in printing (2009).
(45) gFabrication of nanomechanical structures from bulk-GaAs using angled ion etchingh
V. K. Singh, K. Yamazaki, T. Tawara, H. Okamoto, and H. Yamaguchi
Appl. Phys. Express 2, 065001 (2009).