Medium Energy Ion Scattering

Japanese version is [here].


Quantitative Analysis of Atomic Displacement: sub-Angstrom order
Double Alignemnt: Channeling and Blocking
High Energy-Resolution (Electrostatic analyzer)
Depth Resolution: Angstrom order
Mass Resolution: Ga and As peaks are clearly resolved

Angle Resolved Ion Detection in MEIS

Typical operation condition

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Koji Sumitomo /