Japanese version is [here].

Advantages

Quantitative Analysis of Atomic Displacement: sub-Angstrom order

Double Alignemnt: Channeling and Blocking

High Energy-Resolution (Electrostatic analyzer)

Depth Resolution: Angstrom order
Mass Resolution: Ga and As peaks are clearly resolved

• Structure analysis of embedded interface (not only topmost surface)

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Angle Resolved Ion Detection in MEIS

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Typical operation condition

• Probe ion: proton and Helium
• Primary Energy: between 50 and 350 keV
• Electrostatic analyzer: 340 eV resolution for 100 keV proton
• Detector: Position sensitive MCP (angle resolution: 0.1 deg.)

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