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| - MEMS/NEMS |
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| - Nanometrology |
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| - Nanofabrication |
| Publications in 2005 |
| Publications in 2004 |
| H. Yamaguchi, K. Kanisawa, S. Miyashita, and Y. Hirayama "InAs/GaAs (111)A heteroepitaxial systems" Physica E 23 (3-4), 285-292 (2004) [abstract] |
| H. Yamaguchi, S. Miyashita, and Y. Hirayama "Mechanical and piezoresistive properties of InAs/AlGaSb cantilevers" Appl. Surf. Sci. 237 (1-4), 645-649 (2004) [abstract] |
| H. Yamaguchi, S. Miyashita, and Y. Hirayama "Piezoresistive cantilevers using InAs-based 2D heterostructures" Physica E 24 (1-2), 70-73 (2004) [abstract] |
| H. Yamaguchi, S. Miyashita, and Y. Hirayama "Quantum-mechanical displacement sensing using InAs/AlGaSb micromechanical cantilevers," Physica E 21 (2-4), 1053-1056 (2004) [abstract] |
| H. Yamaguchi, Y. Tokura, S. Miyashia, and Y. Hirayama "Quantum interference effects in the magnetopiezoresistance of InAs/AlGaSb quasi-one-dimensional electron systems" Phys. Rev. Lett. 93 (3), 036603 (2004) [abstract] |
| T. Akazaki, H. Yamaguchi, and H. Takayanagi "Nonequilibrium transport of InAs/GaAs(111)A heterostructures coupled with superconducting Nb electrodes" Semicond. Sci. Technol. 19 (4), S182-S184 (2004) [abstract] |
| L. F. Houlet, H. Yamaguchi, S. Miyashita, and Y. Hirayama "InAs/AlGaSb piezoresistive cantilever for sub-angstrom scale displacement detection" Jpn. J. Appl. Phys. Part 2 - Lett. 43 (3B), L424-L426 (2004) [abstract] |
| R. Koch, A. K. Das, H. Yamaguchi, C. Pampuch, and A. Ney "Perpendicular magnetic fields in cantilever beam magnetometry" J. Appl. Phys. 96 (5), 2773-2778 (2004) [abstract] |
| R. Koch, C. Pampuch, H. Yamaguchi, A. K. Das, A. Ney, L. Daweritz, and K. H. Ploog "Magnetoelastic coupling of MnAs/GaAs(001) close to the phase transition" Phys. Rev. B 70 (9), 092406 (2004) [abstract] |
| M. Nagase and H. Namatsu "A method for assembling nano-electromechanical devices on microcantilevers using focused ion beam technology" Ｊpn. J. Appl. Phys. Part 1 - Regul. Pap. Short Notes Rev. Pap. 43 (7B), 4624-4628 (2004) [abstract] |
| Y. Homma, S. Suzuki, Y. Kobayashi, M. Nagase, and D. Takagi "Mechanism of bright selective imaging of single-walled carbon nanotubes on insulators by scanning electron microscopy" Appl. Phys. Lett. 84 (10), 1750-1752 (2004) [abstract] |
| K. Yamazaki and H. Namatsu "5-nm-order electron-beam lithography for nanodevice fabrication" Jpn. J. Appl. Phys. Part 1 - Regul. Pap. Short Notes Rev. Pap. 43 (6B), 3767-3771 (2004) [abstract] |
| K. Yamazaki and H. Namatsu "Two-axis-of-rotation drive system in electron-beam lithography apparatus for nanotechnology applications" Microelectron. Eng. 73-74, 85-89 (2004) [abstract] |
| K. Yamazaki, T. Yamaguchi, and H. Namatsu "Three-dimensional nanofabrication with 10-nm resolution" Jpn. J. Appl. Phys. Part 2 - Lett. Express Lett. 43 (8B), L1111-L1113 (2004) [abstract] |
| M. S. M. Saifullah, D. J. Kang, K. R. V. Subramanian, M. E. Welland, K. Yamazaki, and K. Kurihara "Electron beam nanolithography of beta-ketoester modified aluminium tri-sec-butoxide" J. Sol-Gel Sci. Technol. 29 (1), 5-10 (2004) |
| T. Yamaguchi and H. Namatsu "Effect of developer molecular size on roughness of dissolution front in electron-beam resist" J. Vac. Sci. Technol. B 22 (3), 1037-1043 (2004) [abstract] |
| T. Yamaguchi and H. Namatsu "Impact of developers on roughness of dissolution front in electron-beam resists" J. Photopolym. Sci. Technol. 17(4), 557-566 (2004) [abstract] |
| T. Yamaguchi, K. Yamazaki, and H. Namatsu "Influence of molecular weight of resist polymers on surface roughness and line-edge roughness" J. Vac. Sci. Technol. B 22 (6), 2604-2610 (2004) [abstract] |
| M. Uematsu, H. Kageshima, K. Shiraishi, M. Nagase, S. Horiguchi and Y. Takahashi "Two-dimensional simulation of pattern-dependent oxidation of silicon nanostructures on silicon-on-insulator substrates" Solid-State Electronics, 48, 1073-1078 (2004)[abstract] |