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| - MEMS/NEMS |
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| - Nanometrology |
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| - Nanofabrication |
| Publications in 2005 | Publications in 2007 |
| Publications in 2006 |
| K. Yamazaki and H. Namatsu "Three-Dimensional Resist-Coating Technique and Nanopatterning on a Cube Using Electron-Beam Lithography and Etching" Jpn. J. Appl. Phys. 45, L403-405 (2006) [abstract] |
| K. Yamazaki and H. Namatsu "New Resist-Coating Technique Using Fine Mist for Three-Dimensional Nanotechnology" Tech. Dig. 19th IEEE MEMS, 254-257 (2006) [abstract] |
| T. Yamaguchi and H. Yamaguchi "Resist-Pattern Guided Self-assembly of Symmetric Diblock Copolymer" J. Photopolym. Sci. Technol. 19(3), 385-388 (2006) [abstract] |
| M. Nagase "Integrated Nanoprobe for Measuring Microscopic Electronic Properties" NTT Technical Rev. 4 (2006) 48-52 |
| M. Nagase, K. Nakamatsu, S. Matsui, H. Namatsu and H. Yamaguchi "Carbon Multiprobe on a Si Cantilever for Pseudo-Metal-Oxide-Semiconductor Field-Effect-Transistor" Jpn. J. Appl. Phys. 45, 2009-2013 (2006) [abstract] |
| T. Sakata, H. Ishii, Y. Okabe, N. Sato, M. Nagase, T. Kamei, K. Kudou, M. Yano and K. Machida "Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures" IEEJ Trans. SM. 126, 14-18 (2006) [abstract] |
| K. Nakamatsu, J. Igaki, M. Nagase, T. Ichihashi and S. Matsui "Mechanical characteristics of tungsten-containing carbon nanosprings grown by FIB-CVD " Microelectron. Eng. 83, 808-810 (2006) [abstract] |
| H. Yamaguchi, S. Miyashita, and Y. Hirayama "Giant Magnetopiezoresistance at the Localized-extended Electronic State Transition in a High-mobility 2DEG System" Phys. Stat. Sol. (c) 3, 663 (2006) [abstract] |
| H. Okamoto, T. Akazaki, M. Ueki, H. Yamaguchi and H. Namatsu "A Piezoresistive Cantilever Integrating an InAs-based Semiconductor-Superconductor Junction" Physica E 32, 512-15 (2006) [abstract] |
| H. Yamaguchi, H. Okamoto, S. Miyashita, M. Ueki, and Y. Hirayama "Micro/Nanomechanical Quantum Electron Transport" Journal of Physics 38, 152-7 (2006) [abstract] |
| K. Tsubaki, Y. Nakajima, T. Hanajiri, and H. Yamaguchi "Proposal of Carbon Nanotube Inductors" Journal of Physics 38, 49-52 (2006) [abstract] |
| Y. Ono, J.-F. Morizur, K. Nishiguchi, K. Takashina, H. Yamaguchi, K. Hiratsuka, S. Horiguchi, H. Inokawa, Y. Takahashi "Impurity conduction in phosphorus-doped buried-channel silicon-on-insulator field-effect transistors at temperatures between 10 and 295 K" Phys. Rev. B74, 235317 (2006) [abstract] |
| Y. C. Lin, E. Y. Chang, H. Yamaguchi, Y. Hirayama, X. Y. Chang and C. Y. Chang "Device Linearity Comparison of the Uniformly-Doped and the d-Doped In0.52Al0.48As/In0.6Ga0.4As Metamorphic HEMTs" IEEE Electron Device Letters, 27, 535-537 (2006) [abstract] |
| I. Mahboob, H. Okamoto, M. Ueki, and H. Yamaguchi "Electron phase modulation in a suspended InAs/AlGaSb nanomechanical beam" Appl. Phys. Lett. 89, 192106 (2006) [abstract] |
| T. Yamaguchi and H. Yamaguchi "Block Copolymer Lithography toward 16-nm-technology Nodes and Beyond" NTT Technical Review Vol.4, No.11, pp.17-24 (2006)[abstract] |
| H. Yamaguchi; H. Okamoto; S. Miyashita, M. Ueki, Y. Hirayama "Micromechanical quantum electron transport" Journal of Physics: Conference Series 38, 152 (2006) [abstract] |