• Observation of Si Single-Electron Device (SED) Structures

■ ■ ■ SEM image of SED ■ ■ ■

Scanning electron microscopy (SEM) image of Si single-electron device. Si nanostructure embedded in oxide is clearly observed by secondary electron mode.

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■ ■ ■ 3D modeled structure of SED ■ ■ ■

3D structure of Si single-electron device (SED) was evaluated by nanometrology based on atomic force microscopy (AFM).

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