Semiconductor Nanostructures Research in Low-Dimensional Nanomaterials Research Group
Japanese page is [here].
Review:
- Analysis of Strain in Semiconductor
Nanoscale Thin Films
A thin silicon nano-overlayer (SNOL) fabricated by oxidation and etch-back on a SIMOX (separation
by implantation of oxygen) wafer was investigated by grazing incident X-ray diffraction at incident
angles between 0.01 and 0.1° below the critical angle of total reflection (0.18°). We measured {220}
reflections by probing the sample with respect to the surface normal and found that the SNOL had finite
domains under strain close to the surface. We also found that annealing the sample at 1000°C significantly
reduced inhomogeneous strain and increased the size of the domains in the surface region of the
SNOL.
Topics:
Videos*:
Real-time Obseravtions of Nanostructure Formation on Surfaces (applox 4min)
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